Journal articles

20. L.R. Brockway and H.K. Taylor, "A nanoporous, ultrahydrophobic aluminum-coating process with exceptional dropwise condensation and shedding properties", Materials Research Express, in press, 2017.

19. L.R. Brockway and H.K. Taylor, "A statistical model for the wettability of surfaces with heterogeneous pore geometries", Materials Research Express, 2016. doi:10.1088/2053-1591/3/10/105039

18. R. D. O'Rorke, T. W. J. Steele, and H.K. Taylor, "Bioinspired fibrillar adhesives: a review of analytical models and experimental evidence for adhesion enhancement by surface patterns", Journal of Adhesion Science and Technology, 2015. doi:10.1080/01694243.2015.1101183

17. T. Hallam, A. Shakouri, E. Poliani, A.P. Rooney, I. Ivanov, A. Potie, H.K. Taylor, M. Bonn, D. Turchinovich, S.J. Haigh, J. Maultzsch, and G.S. Duesberg, "Controlled Folding of Graphene: GraFold Printing", Nano Letters, vol. 15, no. 2, pp. 857-863, 2015. doi:10.1021/nl503460p

16. A. Shakouri, J. Yeo, T.Y. Ng, Z. Liu, and H.K. Taylor, "Superlubricity-activated thinning of graphite flakes compressed by passivated crystalline silicon substrates for graphene exfoliation", Carbon, vol. 80, pp. 68-74, 2014. doi:10.1016/j.carbon.2014.08.026

15. C. Iliescu, H.K. Taylor, M. Avram, J. Miao, and S. Franssila, "A practical guide for the fabrication of microfluidic devices using glass and silicon", Biomicrofluidics, vol. 6, no. 1, 016505, 2012. doi:10.1063/1.3689939 (Featured as a "Research Highlight" on the Biomicrofluidics website, and the second most downloaded paper from Biomicrofluidics in March 2012).

14. H.K. Taylor, "Simulation and mitigation of process and pattern dependencies in nanoimprint lithography", Journal of Photopolymer Science and Technology, vol. 24, no. 1, pp. 47-55, 2011. doi:10.2494/photopolymer.24.47 (Accompanying an invited talk at the Photopolymer Science and Technology Conference, Chiba, Japan, June 2011).

13. R.K. Jena, H.K. Taylor, Y.C. Lam, D.S. Boning, and C.Y. Yue, "Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulation", Journal of Micromechanics and Microengineering, vol. 21, 065007, 2011. doi:10.1088/0960-1317/21/6/065007

12. H.K. Taylor, D.S. Boning, and C. Iliescu, "A razor-blade test of the demolding energy in a thermoplastic embossing process", Journal of Micromechanics and Microengineering, vol. 21, 067002, 2011. doi:10.1088/0960-1317/21/6/067002

11. H.K. Taylor, K. Smistrup, and D.S. Boning, "Modeling and simulation of stamp deflections in nanoimprint lithography: exploiting backside grooves to enhance residual layer thickness uniformity", Microelectronic Engineering, vol. 88, pp. 2154-2157, 2011. doi:10.1016/j.mee.2010.12.090 (presented at Micro- and Nano-Engineering, Genoa, Italy, Sep. 2010: abstract .pdf | poster .pdf)

10. H.K. Taylor, Y.C. Lam, and D.S. Boning, "An investigation of the detrimental impact of trapped air in thermoplastic micro-embossing", Journal of Micromechanics and Microengineering, vol. 20, no. 6, 065014, 2010. doi:10.1088/0960-1317/20/6/065014

9. H.K. Taylor, M.R. Hale, Y.C. Lam, and D.S. Boning, "A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers", Journal of Micromechanics and Microengineering, vol. 20 no. 6, 065001, 2010. doi:10.1088/0960-1317/20/6/065001

8. D.L. Henann, V. Srivastava, H.K. Taylor, M.R. Hale, D.E. Hardt, and L. Anand, "Zr-based metallic glasses: viable tool materials for production of surface microstructures in amorphous polymers by micro-hot-embossing", Journal of Micromechanics and Microengineering, vol. 19, no.11, 115030, 2009. doi:10.1088/0960-1317/19/11/115030 (featured on the Institute of Physics website as a "Select" article)

7. X. Zhiguang*, H.K. Taylor*, D.S. Boning, S.F. Yoon, and K. Youcef-Toumi, "Large-area and high-resolution distortion measurement based on moire fringe method for hot embossing process", Optics Express, vol. 17, no. 21, pp. 18394-18407, 2009. doi:10.1364/OE.17.018394 (* contributed equally)

6. H.K. Taylor, Y.C. Lam, and D.S. Boning, "A computationally simple method for simulating the micro-embossing of thermoplastic layers", Journal of Micromechanics and Microengineering, vol. 19, no. 7, 075007, 2009. doi:10.1088/0960-1317/19/7/075007

5. V. Shilpiekandula, D.J. Burns, L. Shiguang, X. Zhiguang, H.K. Taylor, K. Youcef-Toumi and S.F. Yoon, "Fusion of metrology data for large-scale high-volume manufacturing of polymer-based microfluidic devices", International Journal of Nanomanufacturing, vol. 3, no. 4, pp. 312-336, 2009. doi:10.1504/IJNM.2009.027505

4. X. Zhiguang, L. Shiguang, D.J. Burns, V. Shilpiekandula, H.K. Taylor, S.F. Yoon, K. Youcef-Toumi, I. Reading, Z. Fang, J. Zhao and D.S. Boning, "Three-dimensional profile stitching based on the fiducial markers for microfluidic devices", Optics Communications, vol. 282, no. 4, pp. 493-499, 2009. doi:10.1016/j.optcom.2008.10.042

3. H.K. Taylor, D.S. Boning, C. Iliescu and B. Chen, "Computationally efficient modelling of pattern dependencies in the micro-embossing of thermoplastic polymers", Microelectronic Engineering, vol. 85, no. 5-6, pp. 1453-1456, 2008. doi:10.1016/j.mee.2008.01.015 (Presented at Micro- and Nano-engineering, Copenhagen, Sept. 2007: slides .pdf)

2. D. Boning, K. Balakrishnan, H. Cai, N. Drego, A. Farahanchi, K. Gettings, D. Lim, A. Somani, H. Taylor, D. Truque, and X. Xie, "Variation," IEEE Transactions on Semiconductor Manufacturing, vol. 21, no. 1, pp. 63-71, 2008. doi:10.1109/tsm.2007.913194 (Presented at the International Symposium on Quality Electronic Design, 2007.)

1. H.K. Taylor, H. Sun, T.F. Hill, A. Farahanchi and D.S. Boning, "Characterizing and predicting spatial nonuniformity in the deep reactive ion etching of silicon", Journal of the Electrochemical Society, vol. 153, pp. C575-C585, 2006. doi:10.1149/1.2209570


Invited conference presentations

9. (forthcoming) H.K. Taylor, "Defectivity simulation in nanoimprint lithography using a boundary element model for resist droplet spreading and coalescence," to be presented at the 9th IEEE/ACM Workshop on Variability, Modeling, and Characterization, Austin, TX, November 2016.

8. H.K. Taylor, "Polymeric microembossing and nanoimprinting: computationally inexpensive process models for designing inline optical metrology," presented at the International Symposium on Coating Science and Technology, Pittsburgh, PA, September 2016 (plenary).

7. H.K. Taylor, "Computationally inexpensive, multi-scale simulation of polymeric embossing and imprinting," presented at Polymer Replication on the Nanoscale, Windisch, Switzerland, May 2016 (plenary).

6. H.K. Taylor, "Defectivity prediction for droplet-dispensed UV nanoimprint lithography, enabled by fast simulation of resin flow at feature, droplet, and template scales", Proc. SPIE, vol. 9777, 97770E, 2015. doi:10.1117/12.2218757

5. H.K. Taylor, "Enabling layout and process optimization with fast, full-field simulation of droplet-dispensed UV-NIL", presented at Nanoimprint and Nanoprint Technology, Napa, CA, Oct. 2015 (invited). abstract .pdf | presentation .pdf

4. H.K. Taylor, J. An, K. Hu, and N. Dhakal, "Three-dimensional photopolymerized microstructures for in vitro stem cell studies", presented at the World Congress of Biomechanics, Boston, MA, Jul. 2014.

3. H.K. Taylor, C. Iliescu, B. Chen, Y.C. Lam, X. Chen and D.S. Boning, "Modeling pattern dependencies in the micron-scale embossing of polymeric layers", Proc. SPIE, vol. 7269, 726909, 2009. doi:10.1117/12.810732

2. H.K. Taylor, "Tool- and pattern-dependent spatial variations in silicon deep reactive ion etching", presented at International MEMS Conference, Singapore, May 2006. presentation .pdf

1. H.K. Taylor, D.F. Moore, M. Boutchich, P. Boyle, J.H. He, G.J. McShane, R. Breen and R. Wylie, "MEMS packaging techniques for silicon optical benches", presented at IMAPS MicroTech Conference, Cambridge, UK, 2004. presentation .pdf


Contributed conference papers and presentations

28. H. Gramling and H. Taylor, "Nanometer-resolution, wide-field optical measurement of time-varying sub-micron fluid film thicknesses for viscosity determination," in Proc. Micro and Nano Engineering, Vienna, Austria, Sep. 2016. proceedings .pdf

27. B. Kelly, H. Heidari, and H. Taylor, "Computationally efficient modeling of pattern dependences in the free-radical photopolymerization of hydrogel microstructures," in Proc. International Conference on Micromanufacturing, Irvine, CA, Mar. 2016.

26. L. Brockway and H. Taylor, "Tunable Nanoporous Syperhydrophobic Coatings to Promote Dropwise Condensation and Enhance Heat Transfer", presented at the Materials Research Society 2016 Spring Meeting, Phoenix, AZ, Apr. 2016.

25. L. Berryman, L, Brockway, and H. Taylor, "Nonsolvent-induced phase separation synthesis of biomimetic PVDF microspheres for superhydrophobic coatings", presented at the American Chemical Society Spring Meeting, San Diego, CA, Mar. 2016.

24. L. Brockway, L. Berryman, and H. Taylor, "Nonsolvent-induced Phase Separation Synthesis of Biomimetic PVDF Microspheres for Superhydrophobic Coatings", presented at the Materials Research Society 2016 Spring Meeting, Phoenix, AZ, Mar. 2016.

23. R.D. O'Rorke, T.W.J. Steele, and H.K. Taylor, "Can Micro-patterns Improve Adhesion of Bioadhesive Polymers?," presented at the 8th International Conference on Materials for Advanced Technologies (Symposium M), Singapore, Jun. 2015.

22. H.K. Taylor and N. Dhakal, "A chip-scale imprinter with integrated optical interference for calibrating models of NIL resists and resist-stamp boundary conditions", presented at Nanoimprint and Nanoprint Technology, Barcelona, Spain, Oct. 2013. abstract .pdf | presentation .pdf

21. H.K. Taylor, "Modeling and Exploiting Roller-Substrate Contact Tractions in Continuous Imprint Lithography", presented at Nano Science and Technology, Xi'an, China, Sept. 2013.

20. A. Shakouri, J. Yeo, and H.K. Taylor, "The Superlubricity Behavior of Graphene Layers Compressed by Passivated Crystalline Surfaces: A Molecular Dynamics Study", presented at the 7th International Conference on Materials for Advanced Technologies (Symposium S), Singapore, 30 Jun. - 5 Jul. 2013.

19. E.Y.S. Yew, N.K. Balla, and H.K. Taylor, and P.T.C. So, "3D microrheology using wide-field two photon microscopy", presented at Multiphoton Microscopy in the Biomedical Sciences XIII, SPIE Conference 8588, San Francisco, CA, Feb. 2013.

18. A. Shakouri, J. Yeo, and H.K. Taylor, "The Role of Surface Nanotopography in the Adhesion of Graphene on to Silicon Substrates: a Molecular Dynamics Study", presented at the UK-Singapore Materials for Tomorrow Workshop, Singapore, Dec. 2012.

17. H.K. Taylor, "Fast Simulation of Pattern Formation and Process Dependencies in Roller Nanoimprint Lithography", presented at Materials Research Society Fall Meeting, Boston, MA, Nov. 2012. doi:10.1557/opl.2013.49

16. H.K. Taylor, "Simulation of roll-to-roll and roll-to-plate NIL: modeling the effects of process speed, imprinting load, roller elasticity, and pattern design", presented at Nanoimprint and Nanoprint Technology, Napa, CA, Oct. 2012. abstract .pdf

15. H.K. Taylor and E.J. Wong, "Fast simulation of nanoimprint lithography: modeling capillary pressures during resist deformation", presented at Nanoimprint and Nanoprint Technology, Jeju, Korea, Oct. 2011. abstract .pdf

14. D.S. Boning, A.B. Kahng, H.K. Taylor, and Y.-K. Wu, "Chip-scale simulation of residual layer thickness uniformity in thermal nanoimprint lithography: evaluating stamp cavity-height and 'dummy-fill' selection strategies", presented at Nanoimprint and Nanoprint Technology, Copenhagen, Denmark, Oct. 2010. abstract .pdf | presentation .pptx

13. H.K. Taylor, K. Smistrup, and D.S. Boning, "Modeling the enhancement of nanoimprint stamp bending compliance by backside grooves: mitigating the impact of wafer nanotopography on residual layer thickness", presented at Nanoimprint and Nanoprint Technology,Copenhagen, Denmark, Oct. 2010. abstract .pdf | poster .pdf

12. H.K. Taylor and D.S. Boning, "Towards nanoimprint lithography-aware layout design checking", Proc. SPIE, vol. 7641, 764129, 2010. doi:10.1117/12.846499 | presentation .pdf

11. H.K. Taylor and D.S. Boning, "Fast simulation of pattern dependencies in thermal nanoimprint lithography", presented at Nanoimprint and Nanoprint Technology, San Jose, CA, Nov. 2009. abstract .pdf | presentation .pdf

10. H.K. Taylor and D.S. Boning, "An integrated crack-opening method for determining the work of fracture of bonded polymer interfaces", in Proc. Micro Total Analysis Systems, San Diego, CA, Oct. 2008. abstract .pdf | poster .pdf

9. H.K. Taylor, X. Zhiguang, L. Shiguang, K. Youcef-Toumi, S.F. Yoon and D.S. Boning, "Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates", Proc. SPIE, vol. 7155, 715528, 2008. doi:10.1117/12.814582

8. H.K. Taylor and D.S. Boning, "Diffraction-based approaches to the in-situ measurement of dimensional variations in components produced by thermoplastic micro- and nano-embossing", in Proc. 5th International Symposium on Nanomanufacturing, Singapore, Jan. 2008. paper .pdf | presentation .pdf

7. V. Shilpiekandula, D.J. Burns, H.K. Taylor, K. Youcef-Toumi, S. Li, Z. Xu, I.A.D. Reading and S.F. Yoon, "Fusion of metrology data for large-scale high-volume manufacturing of polymer-based microfluidic devices", in Proc. Second International Conference on Micromanufacturing, Greenville, SC, 2007. paper .pdf

6. M. Dirckx, H. Taylor and D. Hardt, "High-temperature de-molding for cycle time reduction in hot embossing", in Proc. Society of Plastics Engineers Annual Technical Conference, 2007, pp. 2972-2976. paper .pdf

5. A.J. Hart, H.K. Taylor, A.H. Slocum, "2D and 3D growth of carbon nanotubes on substrates, from nanometre to millimetre scales", International Journal of Nanomanufacturing, vol. 1, no. 6, pp. 701-709, 2007. doi:10.1504/IJNM.2007.017989

4. M. Dirckx, H.K. Taylor and D.E. Hardt, "Tooling for micro- and nano-imprinting and its consequences for manufacturing", in Proc. International Symposium on Nanomanufacturing, Cambridge, MA, 2006. paper .pdf

3. H. Sun, T.F. Hill, H.K. Taylor, M.A. Schmidt and D.S. Boning, "A two-level prediction model for deep reactive ion etch (DRIE)", in Proc. International Conference on Microelectromechanical Systems, 2005, pp. 491-495. doi:10.1109/MEMSYS.2005.1453974

2. J.H. He, D.F. Moore, H.K. Taylor, M. Boutchich, P. Boyle, G.J. McShane, M. Hopcroft and J.K. Luo, "Micro- mechanical characterisation for MEMS thin films by bending micro-machined cantilevers", in Proc. Fifth International Conference on Semiconductor Devices and Microsystems, 2004, pp. 287-290. paper .pdf

1. T.F. Hill, H. Sun, H.K. Taylor, M.A. Schmidt and D.S. Boning, "Pattern density-based prediction for deep reactive ion etch (DRIE)", in Proc. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, 2004. paper .pdf


Theses and reports

2. H.K. Taylor, "Modeling and controlling topographical uniformity in micro- and nano-embossing of thermoplastic polymers", PhD thesis, Massachusetts Institute of Technology, September 2009. thesis .pdf

1. H.K. Taylor, "Beam-based MEMS structures", MEng project report, Cambridge University, May 2004. report .pdf


Patents and patent applications

5. R. Hensleigh, B.D. Moran, J.A. Jackson, E. Duoss, B. Kelly, M. Shusteff, H. Taylor, and C. Spadaccini, "System and method for stimulated emission depletion projection stereolithography," US Provisional Patent Application 15/244,605, filed 23 August, 2016.

4. L.R. Brockway, L. Berryman, and H.K. Taylor, "Tunable Hollow Poly(Vinylidene Difluoride) Microspheres," US Provisional Patent Application 62/270,218, filed 21 December, 2015.

3. L.R. Brockway and H.K. Taylor, "A Superhydrophobic Coating", US Provisional Patent Application 62/207,109, filed 19 August, 2015. Renamed "Liquid-Repellent Coatings" and filed as a full patent application under PCT/US2016/047680, 19 August 2016.

2. H.K. Taylor and D.S. Boning, "Method and Apparatus for Embossing a Deformable Body", US Utility Patent 8,585,954, issued 19 November, 2013.

1. H.K. Taylor and D.S. Boning, "Method and Apparatus for Modeling Deformation of a Deformable Body Embossed with a Stamp", US Utility Patent 8,145,457, issued 27 March, 2012.


Hayden Taylor's ResearcherID is A-9545-2008. Click here to view his publications on the ResearcherID website.

Last updated February 2017. Disclaimer: PDF files on this website are provided for purely personal, educational use. Publishers' copyright restrictions may apply.